Optical component having positioning markers and method for making the same
AssigneeNHK Spring Co., Ltd.
InventorsFumio Takahashi, Fumitaka Yoshino
Life of this patent
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AssigneeNHK Spring Co., Ltd.
InventorsFumio Takahashi, Fumitaka Yoshino
Estimating the term…
The fabrication of an optical component comprising an optical waveguide and positioning marker on a same substrate is facilitated, and the yield of the fabrication process for such an optical component is increased. By forming the core segment of the optical waveguide and the positioning marker in a same step, the positional accuracy between the core segment and the positioning marker can be improved without requiring a high level of expertise or expensive equipment such as a photographic exposure device. In the optical component comprising an optical waveguide and positioning marker on a substrate, the positioning marker is provided with rounded corners or a curved profile whereby it is possible to avoid the stress concentration which would otherwise develop due to the difference in thermal expansion between the various layers at the time of thermal processing, and the cracks which would otherwise develop in the positioning marker and the surrounding layers.
A method for making an optical component comprising an optical waveguide and positioning marker which are formed on a common substrate, comprising the steps of:
An optical component comprising an optical waveguide and positioning marker which are formed on a common substrate, comprising:
Dependencies are inferred from the claim text.