Mounting device for an optical element

A micro lithographic projection exposure objective having a device for mounting an optical element with the following features:

• 1.1 a support member and two or more gear elements,
• 1.2 the support member is connected to an external mounting structure and, via base points, to the gear elements,
• 1.3 via top points, the gear elements are connected to the optical element directly, or are connected to the optical element indirectly via a mount arranged therebetween,
• 1.4 the top points of the gear elements are located in planes of symmetry of the optical element which are defined by an axial axis and a radial axis of the optical element,
• 1.5 the gear elements are arranged and dimensioned such that in the event of disturbing influences a compensation effect is produced with regard to a deformation of an optical surface of the optical element,
• 1.6 the compensation effect being provided when a RMS value of the sum of those partial deformations of the optical surface of the optical element which are caused by an axial force, a radial force and a tangential element at an arbitrary top point of a gear element is less than or at least equal to one half of the largest RMS value of one of the three said partial deformations.

A mounting device for an optical element in an assembly having the following features:

• 1.1 a support member and two or more gear elements,
• 1.2 the support member is connected to an external mounting structure and, via base points, to the gear elements,
• 1.3 via top points, the gear elements are connected to the optical element directly, or are connected to the optical element indirectly via a mount arranged therebetween,
• 1.4 the top points of the gear elements are located in planes of symmetry of the optical element which are defined by an axial axis and a radial axis of the optical element
• 1.5 wherein an axial force applied to an arbitrary one of said top points causes a first partial deformation of said optical surface, said first partial deformation having a first RMS value, wherein a radial force applied to an arbitrary one of said top points causes a second partial deformation of said optical surface having a second RMS value, wherein a tangential momentum applied to an arbitrary one of said top points causes a third partial deformation of said optical surface having a third RMS value, wherein one of said first, second and third RMS values having a largest absolute value being a largest RMS value, a sum of said first, second and third partial deformations causing an overall deformation of said optical surface with a sum RMS value,
• 1.6 and wherein the gear elements are arranged and dimensioned such that said overall deformation of said optical surface is compensated in a manner that the sum RMS value is less than or equal to one half of the largest RMS value of said partial deformations.