Optical switch

An optical switch, comprising:

• a substrate,
• an electrostatic actuator formed over the substrate, said electrostatic actuator comprising,
• a reciprocating mass located in the center of the electrostatic actuator,
• first rotating axes located symmetrically at opposite sides of the reciprocating mass,
• first rotating masses rotatably connected to the first rotating axes,
• first rotating springs for supporting the first rotating masses,
• linear springs connected to the first rotating masses for supporting the first rotating masses together with the rotating springs,
• second rotating masses connected to the linear springs to restrict their displacement in one direction,
• second rotating springs for supporting the second rotating masses with first ends of the second rotating masses connected thereto,
• second rotating axes connected to the second rotating masses,
• structural anchors integrated with the second rotating axes and positioned at sides of the actuator,
• drive electrodes, and
• a micro mirror movable by the same displacement as the reciprocating mass,
• wherein the electrostatic actuator having two structural stability positions for the reciprocating mass and the left and right rotating masses.