Exposure apparatus
AssigneeCanon Kabushiki Kaisha
InventorsTomoharu Hase, Yukio Yamane, Yoshinori Miwa
Life of this patent
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Abstract
An exposure apparatus for transferring a pattern onto an object. The apparatus includes an optical member constituting part of an optical system arranged between a light source and the object, a rotor having a hole extending in an axial direction thereof, the optical member being mounted in the hole, a stator, the rotor and the stator constituting a motor for rotating the optical member, and a non-contact bearing for supporting the rotor.
Claims25
An exposure apparatus for transferring a pattern onto an object, said apparatus comprising:
- an optical member constituting part of an optical system arranged between a light source and the object;
- a rotor having a hole extending in an axial direction thereof, said optical member being mounted in the hole;
- a stator, said rotor and said stator constituting a motor for rotating said optical member;
- and
- a non-contact bearing for supporting said rotor.
An exposure apparatus for transferring a pattern onto an object, said apparatus comprising:
- an optical member constituting part of an optical system arranged between a light source and the object;
- a rotor having a hole extending in an axial direction thereof, said optical member being mounted in said hole;
- a stator, said rotor and said stator constituting a motor for rotating said optical member;
- a bearing for supporting said rotor;
- and
- a flow path through which a gas flows from a space in a housing in which said optical member is arranged to an outside through said bearing.
An exposure apparatus for transferring a pattern onto an object, said apparatus comprising:
- an optical member constituting part of an optical system arranged between a light source and the object;
- a rotor having a hole extending in an axial direction thereof, said optical member being mounted in said hole;
- a stator, said rotor and said stator constituting a motor for rotating said optical member;
- a bearing for supporting said rotor;
- and
- a flow path through which a gas which passes through said driving mechanism flows from a space in a housing in which said optical member is arranged to an outside.
An exposure method of transferring a pattern onto an object, said method comprising the steps of:
- arranging the object at a predetermined position;
- and
- arranging an optical system between a light source and the object,
- wherein the optical system includes an optical member that is driven by a motor including a rotor and a stator, the rotor being supported by a non-contact bearing and having a hole extending in an axial direction thereof, the optical member being mounted in the hole.
An exposure method of transferring a pattern onto an object, said method comprising the steps of:
- arranging the object at a predetermined position;
- transferring a pattern onto the object with the exposure light;
- and
- driving an optical member by a motor in order to change a phase of interference fringes formed on the object with exposure light, the motor including a rotor and a stator, the rotor being supported by a non-contact bearing and having a hole extending in an axial direction thereof, the optical member being mounted in the hole.
A device manufacturing method comprising the steps of:
- applying a photosensitive material to a substrate;
- arranging the substrate at a predetermined position;
- and
- transferring a pattern onto the substrate with light that has passed through an optical system arranged between a light source and the substrate,
- wherein the optical system includes an optical member that is driven by a motor including a rotor and a stator, the rotor being supported by a non-contact bearing and having a hole extending in an axial direction thereof, the optical member being mounted in the hole.
A device manufacturing method comprising the steps of:
- applying a photosensitive material to a substrate;
- arranging the substrate at a predetermined position;
- transferring a pattern onto the substrate with the exposure light;
- and
- driving an optical member by a motor in order to change a phase of interference fringes formed on the object with exposure light, the motor including a rotor and a stator, the rotor being supported by a non-contact bearing and having a hole extending in an axial direction thereof, the optical member being mounted in the hole.
Dependencies are inferred from the claim text.