Stage system with driving mechanism, and exposure apparatus having the same
AssigneeCanon Kabushiki Kaisha
InventorKeiji Emoto
Life of this patent
Estimating the term…
Abstract
An exposure apparatus includes a control device for controlling an operation of the exposure apparatus, a temperature adjusting device for adjusting temperature in a predetermined portion in which temperature is changeable with operation of the exposure apparatus, and a calculator for calculating an adjusting amount of the temperature adjusting device to the predetermined portion, prior to an occurrence of a temperature change in the predetermined portion, on the basis of a signal produced by the control device, the signal being able to control the operation of the exposure apparatus.
Claims20
An exposure apparatus comprising:
- a control device for controlling an operation of said exposure apparatus;
- a temperature adjusting device for adjusting temperature in a predetermined portion in which temperature is changeable with operation of said exposure apparatus;
- and
- a calculator for calculating an adjusting amount of said temperature adjusting device to the predetermined portion, prior to an occurrence of a temperature change in the predetermined portion, on the basis of a signal produced by said control device, the signal being able to control the operation of said exposure apparatus.
A driving system, comprising:
- a driving mechanism;
- a control device for controlling an operation of said driving mechanism;
- a temperature adjusting device for adjusting temperature in a predetermined portion in which temperature is changeable with the operation of said driving mechanism;
- and
- a calculator for calculating an adjusting amount of said temperature adjusting device to the predetermined portion, prior to an occurrence of a temperature change in the predetermined portion, on the basis of a signal produced by said control device, the signal being able to control the operation of said driving mechanism.
A device manufacturing method, comprising the steps of:
- adjusting, through a temperature adjusting device, a temperature of a predetermined portion in which temperature is changeable with operation of an exposure apparatus;
- calculating an adjusting amount of the temperature adjusting device to the predetermined portion, prior to an occurrence of a temperature change in the predetermined portion, on the basis of a signal being able to control the operation of the exposure apparatus;
- and
- transferring a pattern of an original onto a substrate by use of the exposure apparatus.
Dependencies are inferred from the claim text.