Liquid crystal display device substrate and method for manufacturing thereof
AssigneeLG Electronics Inc.
InventorsWoong-Kwon Kim, Jae-Beom Choi, Sung-Sik Bae, Kwang-Jo Hwang
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Abstract
A liquid crystal display according to the present invention uses an organic layer treated with H2 plasma before fabricating an inorganic layer on the top of the organic layer. When forming thin film transistors (TFT) used in the LCD, an Indium Tin Oxide layer is fabricated above the TFTs and acts as a pixel electrode. When the organic layer, such as a passivation layer, is treated with the H2 plasma, an intermediate layer having an O—H bonding structure is formed to enhance bonding or attachment of an inorganic layer, such as an ITO layer, to the organic layer.
Claims10
A pixel element of a liquid crystal display device comprising:
- a substrate;
- a first layer formed above the substrate;
- an intermediate layer covering at least part of the first layer, the intermediate layer formed by treating the surface of the first layer with plasma containing hydrogen;
- and
- a second layer formed above the intermediate layer further comprising an additional intermediate layer by treating the first layer with plasma containing at least one of oxygen and argon between the first layer and the intermediate layer.
A pixel element of a liquid crystal display device comprising
- a substrate;
- a first layer formed above the substrate;
- an intermediate layer covering at least part of the first layer, the intermediate layer formed by treating the surface of the first layer with plasma containing hydrogen;
- a second layer formed above the intermediate layer;
- and further comprising an additional intermediate layer by treating the intermediate layer with plasma containing at least one of oxygen and argon between the intermediate layer and the second layer.
A liquid crystal display device comprising:
- a substrate;
- a switching element formed above the substrate, the switching element having at least one electrode;
- an organic layer covering at least part of the substrate having the switching element;
- an intermediate layer formed by treating at least part of the surface of the organic layer with plasma containing hydrogen;
- a contact hole exposing the at least one electrode of the switching element by removing at least a portion of the organic layer and the intermediate layer covering the electrode;
- and
- an inorganic layer connecting to the at least one electrode through the contact hole on the intermediate layer further comprising an additional intermediate layer by treating the organic layer with plasma containing at least one of oxygen and argon between the organic layer and the intermediate layer.
A liquid crystal display device comprising:
- a substrate;
- a switching element formed above the substrate, the switching element having at least one electrode;
- an organic layer covering at least part of the substrate having the switching element;
- an intermediate layer formed by treating at least part of the surface of the organic layer with plasma containing hydrogen;
- a contact hole exposing the at least one electrode of the switching element by removing at least a portion of the organic layer and the intermediate layer covering the electrode;
- an inorganic layer connecting to the at least one electrode through the contact hole on the intermediate layer;
- further comprising an additional intermediate layer by treating the intermediate layer with plasma containing at least one of oxygen and argon between the intermediate layer and the inorganic layer.
Dependencies are inferred from the claim text.