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US 6,552,469 B1Granted
Solid state transducer for converting between an electrical signal and sound
AssigneeKnowles Electronics, LLC
InventorsMichael Pederson, Peter V. Loeppert
Life of this patent
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Abstract
A solid state transducer is disclosed. The transducer comprises a micromachined electrostatic actuator formed of silicon, a support brace disposed about the actuator, and a membrane coupled to the support brace. The actuator is operatively coupled to the membrane. The transducer may be either a receiver or a microphone.
Claims13
A solid state transducer for converting between an electrical signal and sound comprising:
- an actuator comprising a silicon substrate having a doped portion, a metallization layer and an electrostatic cantilever disposed between the metallization layer and the silicon substrate wherein when a potential difference exists between the silicon substrate and the metallization layer a deflection force is incident upon the cantilever;
- a support brace disposed about the actuator which supports the actuator;
- and
- a membrane coupled to the support brace and to the cantilever.
1 more element
Dependencies are inferred from the claim text.