Aligner
AssigneeAdtec Engineering Co., Ltd.
InventorsKatsumi Momose, Masatoshi Asami
Life of this patent
Estimating the term…
Abstract
The invention provides an aligner enabling to perform high accuracy positioning at manufacturing a multi-layered circuit board. A board alignment mark is photographed by a CCD camera by irradiating X-ray from an X-ray generator at the state removing a photo mask, and position of the board alignment mark is memorized. Then, the photo mask is set on a print circuit board, a mask alignment mark is photographed, and positioning of the mask alignment mark and the print circuit board is performed by comparing with position of memorized board alignment mark and by moving a platen so that the gap becomes zero.
Claims13
An aligner for manufacturing a multi-layered circuit board having plural insulation layers and plural conductive layers drawing conductive patterns, comprising:
- a photo mask enabling to arrange at one side of a board forming a multi-layered circuit and drawing conductive patterns formed on the board;
- a board alignment mark formed on at least one layer of said board and enabling to photograph using an X-ray;
- a mask alignment mark drawn on the photo mask;
- an X-ray generator irradiating X-ray to an area including said board alignment mark;
- a unit removing the photo mask out of X-ray irradiation range of the X-ray generator;
- a projecting member enabling to convert the X-ray to visible light, ultraviolet rays, or infrared rays and to which an image of the board alignment mark irradiated using the X-ray is projected;
- a unit detecting position of the board alignment mark projected onto the projecting member;
- a unit detecting position of the mask alignment mark of the photo mask at the state being arranged at one side of the board;
- a moving unit moving one of the board and the photo mask or both so that positioning of the board and the photo mask is performed based on the detected board alignment mark and mask alignment mark;
- and
- an exposure light source exposing a pattern drawn on the photo mask after the positioning.
Dependencies are inferred from the claim text.