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US 6,551,931 B1Granted
Method to selectively cap interconnects with indium or tin bronzes and/or oxides thereof and the interconnect so capped
AssigneeInternational Business Machines Corporation
InventorsDaniel C. Edelstein, Sung Kwon Kang, Maurice McGlashan-Powell, Eugene J. O'Sullivan, George F. Walker
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Abstract
A method to selectively cap interconnects with indium or tin bronzes and copper oxides thereof is provided. The invention also provides the interconnect and copper surfaces so formed.
Claims23
A method to selectively coat a copper substrate with a Cu-based alloy comprising:
- providing a copper substrate having at least one exposed Cu surface;
- providing an immersion deposition bath wherein said bath comprises a plating metal comprised of In or Sn, and wherein said bath further comprises a copper complexing agent;
- immersing said copper substrate in said immersion deposition bath hereby forming on said copper substrate a metal film comprised of said plating metal;
- and
- annealing said metal film at an elevated temperature of at least 200° C. in an inert or reducing ambient, forming said Cu-based metal alloy.
2 more elements
Dependencies are inferred from the claim text.