Electrodeposition of metals for forming three-dimensional microstructures

Abstract

Microscopic mechanical elements suitable for manufacture of microelectromechanical systems (MEMS) are directly prepared by forming a low-relief base of microscopic dimensions on a substrate surface by any conventional means, and electrodepositing a metal preferentially on the upper surface of the base to produce a vertically-extending 3-dimensional structure. In a first step, the patterned substrate and a counterelectrode are contacted with an electrolyte and an electric current is passed between the substrate and counterelectrode, with the substrate being predominantly cathodic with respect the counterelectrode. In a first step the electrolytic environment at the substrate surface is maintained as a microprofile, whereby metal is deposited preferentially at the upper edge or tip of the base until the structure has been increased in height, and, in a second step, the electrolytic environment at the substrate surface is maintained as a macroprofile to continue the deposition of metal at the upper edge or tip of the structure until the desired relief is obtained.

Dependencies are inferred from the claim text.