Apparatus for etching glass substrate in fabrication of LCD
AssigneeLG.Philips LCD Co., Ltd.
InventorYong Il Doh
Life of this patent
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Abstract
Disclosed is an improved apparatus for holding a bubble plate of an etching apparatus, in place with a cylinder, which is applicable to a glass substrate etching process, in order to facilitate changing and cleaning of the as bubble plate in a short period of time, as well as to prevent a low-quality etching and damage of the glass substrate caused by displacement of cassette guides in the etching apparatus. The etching apparatus according to the invention includes an etching bath having an etching solution, a plurality of cassette guides on a bottom surface of the etching bath, a cylinder on an external side of the etching bath, a plurality of plungers on the cylinder and the cassette guides, and a bubble plate fixed by the cassette guides.
Claims16
An apparatus for etching a glass substrate, comprising:
- an etching bath;
- a plurality of cassette guides on a bottom surface of the etching bath;
- a cylinder on an external side of the etching bath;
- a plurality of plungers on the cylinder and the cassette guides;
- and
- a bubble plate held by the cassette guides.
An apparatus for etching a glass substrate, comprising:
- an etching bath;
- a plurality of cassette guides on a bottom surface of the etching bath;
- a cylinder on an external side of the etching bath;
- a plurality of plungers on the cylinder and the cassette guides;
- and
- a bubble plate held by the plunger.
Dependencies are inferred from the claim text.