Intermediate metallic layer for flat packing and process for the production of a flat packing with such an intermediate layer

#The present invention relates to a vacuum packing configuration comprising a pneumatically or hydraulically expandable first packing part as well as a second packing part against which the first is stressed, forming a seal.

#The present invention relates furthermore to vacuum treatment installations with a stator with an interior volume substantially having the shape of a body generated by revolution, for a rotor comprising a multiplicity of workpiece holding fixtures spaced apart with respect to a rotational drive axle, with the stator comprising a multiplicity of treatment and/or transfer-through ports communicating with the interior volume for workpieces of a workpiece holding fixture, and in which, further, each of the workpiece holding fixtures driven on the rotor is directly positionable at each of the ports on the stator and in each instance a pneumatically or hydratulically actuatable packing configuration hermetically seals the workpiece holding fixture at the port against the remaining interior volume of the stator.

#A vacuum packing configuration of the above described type is known from European patent application EP 0 555 764 or U.S. Pat. No. 5,415,729. It comprises a metallic bellows tube which forms a sealing structure via a part comprising a resilient material, especially intended for this purpose, such as for example a polymer such as TEFLON material (TEFLON is a trademark) or an elastomeric material, against the passive second packing part.

#In the following the invention will be explained by example in conjunction with drawings, wherein:

#FIG. 1 is a schematic cross sectional view of a prototypical variant of a vacuum packing configuration according to the invention;

#FIG. 2 is a view similar to FIG. 1 and building on the representation of FIG. 1, of a preferred embodiment of the vacuum packing configuration;

#According to FIG. 1 a packing configuration 1 according to the invention comprises a controlled or active part 3 which is formed by a metal diaphragm 7 forming on all sides a sealing connected with one of the installation parts 5. In the hollow volume 7a formed between the metal diaphragm 7 and associated installation or equipment part 5, a pressurization line 9 for a gaseous or potentially liquid actuation medium, terminates. Upon being pressurized, the diaphragm 7 is stepped up resiliently over a relatively small displacement (shown in dashed lines) and comes into intimate contact on the installation part 11 to be sealingly connected with part 5. The diaphragm 7, structured substantially as a metal spring, under pressure relief due to its resilient properties flexes back into the precisely predetermined resting position. If the installation part 11, and in particular the portion of this part against which the diaphragm 7 is pressed when tightness is being established, is a metallic part, then under control a thermal bridge or a thermal shortcircuit develops as indicated by the double arrow Q wherein in particular also the thermal conductivity of the actuating medium placed under pressure from line 9—in this case preferably a liquid medium—must also be taken into consideration. Thereby, apart from the creation of the tightness, specifically and depending on the direction of the temperature gradient obtaining between parts 5 and 11, a thermal flux connection is established. Therewith it is possible, if, as shown schematically in FIG. 1, a heat source S is located on one side of the packing configuration 1, for example on part 11, to divert the thermal flux onto part 5 in order to prevent that critical heat portion flow off on the installation part 11, according to FIG. 1 toward the right: a thermal shortcircuit is established under control.

#The packing configuration according to the invention according to FIG. 1 can be carried along long contours to be sealed of virtually any shape as will become evident in particular in connection with the description of a preferred embodiment example of the installation according to the invention and as is represented by example in FIGS. 5(a) to 5(d).

#FIG. 2 shows a preferred embodiment of the packing configuration according to the invention. Substantially the same reference symbols as in FIG. 1 are used. The metal diaphragm 3′ is here structured substantially in the form of a W. The limbs of the W are laterally bent out and the W bends are each U-shaped. Upon pressurization through line 9, and in contrast to a bellows, due to slight changes of the curvature in the W cross section shape, the membrane is placed intimately in contact on installation part 11. FIG. 3 also shows, by example, the way in which the lateral tightness of the pressure volume 7a disposed underneath the diaphragm 3′ is established, namely by means of elastic packings 13, against which the diaphragm 3′ is clamped by means of clamping elements 15.