Ultrasonic detecting apparatus
AssigneeMitsubishi Heavy Industries, Ltd.
InventorsMasaru Kodama, Kiyotaka Iwatsubo, Nobuhiko Nishimura, Toshihiko Imamoto, Masaaki Fujita
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Abstract
An ultrasonic detecting apparatus includes a transmitting element for emitting an ultrasonic wave toward a surface to be probed inside a sample from a surface of the sample at a predetermined angle. The ultrasonic detecting apparatus also includes a receiving element for receiving the ultrasonic wave reflected from the surface of the sample. The transmitting element and the receiving element are separated from each other on a single pedestal and are movable on the surface of the sample in a direction perpendicular to the surface to be probed. A distance between the transmitting element and the receiving element is arbitrarily changeable.
Claims11
An ultrasonic detecting apparatus comprising:
- a transmitting element for emitting an ultrasonic wave toward a surface to be probed inside a sample from a surface of said sample at a predetermined angle;
- and
- a receiving element for receiving said ultrasonic wave reflected from said surface of said sample, said transmitting element and said receiving element being separated from each other on a single pedestal,
- said transmitting element and said receiving element being movable on said surface of said sample in a direction perpendicular to said surface to be probed, a distance between said transmitting element and said receiving element being arbitrarily changeable.
Dependencies are inferred from the claim text.