Electric device and method of driving the same
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsTakashi Inushima, Vaitkus Rimantas, Masaaki Hiroki, Eiji Sato, Satoshi Teramoto
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AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsTakashi Inushima, Vaitkus Rimantas, Masaaki Hiroki, Eiji Sato, Satoshi Teramoto
Estimating the term…
A thermistor layer made of platinum is formed on a thin diamond film. An amount of heat carried away from the diamond film by a fluid is detected as a change in the temperature of the thermistor layer. The rear side of the diamond film is kept in contact with the fluid to prevent the material of the thermistor from being corroded by the fluid. In another aspect of the invention, a heating element and a thermistor are formed on one surface of a thin diamond film. The other surface is kept in contact with a fluid. The diamond film is heated by the heating element in a quite short time of about 0.2 second. The resulting response characteristics of the diamond film are detected by the thermistor. The flow rate is calculated from the response characteristics.
An electric device for monitoring a fluid comprising:
An electric device for monitoring a fluid comprising:
An electric device for monitoring a fluid comprising:
An electric device for monitoring a fluid comprising:
An electric device for monitoring a fluid comprising:
An electric device comprising:
An electric device provided on a path for passing a fluid therethrough comprising:
An electric fluid monitoring device provided on a path for passing a fluid therethrough, comprising:
An electric fluid monitoring device comprising:
An electric device comprising:
An electric device comprising:
An electric device comprising:
Dependencies are inferred from the claim text.