Method for mounting electrode assembly
AssigneesSony Electronics Inc., Sony Corporation
InventorsJoseph Mitchell Szettella, Jeffery Ozee, Augusto James Gonzales
Life of this patent
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Abstract
A mounting method for mounting an electrode assembly on a plasma etching apparatus includes inserting alignment pins in apertures of the plasma etching apparatus. Apertures of the electrode assembly are aligned relative to the alignment pins. The electrode assembly is then mounted on the plasma etching apparatus, passing the alignment pins through the apertures of the electrode assembly. Each alignment pin is then replaced with a locking arrangement.
Claims16
A method of mounting an electrode assembly on a plasma etching apparatus, the mounting method comprising:
- inserting each of a plurality of alignment pins in a respective one of a plurality of apertures in the plasma etching apparatus such that each alignment pin extends from one of said plurality of apertures and has a central axis that extends along an entire length of that alignment pin and that passes through a center of said one of said plurality of apertures;
- aligning a plurality of apertures in the electrode assembly relative to the alignment pins such that said central axis of each of said alignment pins extends through a center of one of said plurality of apertures in said electrode assembly;
- mounting the electrode assembly on and in proper alignment with the plasma etching apparatus by passing the alignment pins through the apertures of the electrode assembly;
- and
- replacing each of the alignment pins with a fastener.
A method of mounting an electrode assembly on a plasma etching apparatus, the method comprising aligning and mounting said electrode assembly on said plasma etching apparatus by placing alignment pins inserted in apertures in said plasma etching apparatus through corresponding apertures in said electrode assembly.
Dependencies are inferred from the claim text.