Apparatus and method for generating map data
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorKazunori Morinaga
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Abstract
Disclosed herein is a map data generating apparatus includes probers for generating map data from execution of each of a plurality of processes constituting wafer tests; and a cell controller for preserving the generated map data upon receipt thereof and for generating map data as final results in accordance with a classification code table combining classification codes for each of the processes in a manner determining final classification codes.
Claims12
A map data generating apparatus comprising:
- probers for generating map data corresponding to a plurality of test chips of a wafer from execution of each of a plurality of processes constituting wafer tests wherein each of the plurality of processes is performed on a respective test chip;
- and
- a cell controller for preserving the generated map data upon receipt thereof and for generating map data as final results in accordance with a classification code table which determines a final classification code for each respective test chip by combining classification codes for each of said plurality of processes.
A map data generating apparatus comprising:
- probers for generating map data corresponding to a plurality of test chips of a wafer from execution of each of a plurality of processes constituting wafer tests wherein each of the plurality of processes is performed on a respective test chip;
- and
- a cell controller for preserving the generated map data upon receipt thereof and for generating a final classification code for each respective test chip through logical operations on the basis of a classification code obtained corresponding to the execution of at least one of the plurality of processes before a current process and a classification code obtained in the current process.
A map data generating method in which map data are generated corresponding to a plurality of test chips of a wafer from execution of each of a plurality of processes constituting wafer tests wherein each of the plurality of processes is performed on a respective test chip, said method comprising the step of generating map data as final results in accordance with a classification code table which determines a final classification code for each respective test chip by combining classification codes for each of said plurality of processes.
Dependencies are inferred from the claim text.