Semiconductor memory device including plurality of global data lines in parallel arrangement with low parasitic capacitance, and fabrication method thereof
AssigneesMitsubishi Denki Kabushiki Kaisha, Mitsubishi Electric Engineering Company Limited
InventorsTsukasa Ooishi, Hiroaki Tanizaki
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Abstract
A read data line pair is arranged for every four memory cell columns. Column selection in data reading is carried out by four sub read source lines. A write data line pair is arranged for every eight memory cell columns. Column selection in a data write operation is carried out by eight sub write activation lines. By differentiating the number between the read data line pairs and the write data line pairs and the corresponding memory cell columns, the wiring pitch of the data lines can be alleviated to suppress parasitic capacitance while avoiding significant increase of the signal lines to execute column selection.
Claims1
A semiconductor memory device formed on a semiconductor substrate, comprising:
- a plurality of memory cells arranged in a matrix, each said memory cell including:
- an access transistor arranged in a transistor layer formed on said semiconductor substrate, and
- a data storage capacitor arranged in a capacitor layer formed at the top surface of said transistor layer at a height between a first height and a second height, said data storage capacitor including:
- a cell plate having a reference potential, and a charge storage node to accumulate charges corresponding to stored data;
- and
- a line arranged at an interconnection layer formed at the top surface of said transistor layer at a height between a third height and a fourth height in a periphery region of said plurality of memory cells, the third height being lower than said second height and the fourth height being higher than said second height;
- wherein
- said cell plate is formed at a top surface side of said capacitor layer in common to said plurality of memory cells, and
- said line is arranged to electrically couple to said cell plate directly and to couple to said reference potential.
Dependencies are inferred from the claim text.