Micromachined parallel-plate variable capacitor with plate suspension

A capacitor comprising:

• a bottom plate;
• a top plate having a center portion and an outer portion;
• and
• a support connected to said center portion of said top plate for positioning said top plate over said bottom plate and separated therefrom by a gap, wherein
• said outer portion of said top plate moves relative to said bottom plate when a potential is applied between said top and bottom plates, and
• wherein said outer portion of said top plate is connected to said center portion of said top plate by a plurality of springs and wherein said movement of said top plate relative to said bottom plate is accommodated by bending at least one of said springs.

A capacitor comprising:

• a bottom plate;
• a top plate having a center portion and an outer portion;
• a spacer for setting the minimum distance between said outer portion of said top plate and said bottom plate;
• and
• a support connected to said center portion of said top plate for positioning said top plate over said bottom plate and separated therefrom by a gap, wherein
• said outer portion of said top plate moves relative to said bottom plate when a potential is applied between said top and bottom plates, and
• wherein said spacer comprises a protrusion on said outer portion of said top plate.

A capacitor comprising:

• a bottom plate;
• a top plate having a center portion and an outer portion;
• a spacer for setting the minimum distance between said outer portion of said top plate and said bottom plate;
• and
• a support connected to said center portion of said top plate for positioning said top plate over said bottom plate and separated therefrom by a gap, wherein
• said outer portion of said top plate moves relative to said bottom plate when a potential is applied between said top and bottom plates, and
• wherein said outer portion of said top plate deforms when said outer portion is pressed against said spacer in response to the application of a potential difference greater than a predetermined value between said top and bottom plates.

A capacitor comprising:

• a bottom plate;
• a top plate having a center portion and an outer portion;
• and
• a support connected to said center portion of said top plate for positioning said top plate over said bottom plate and separated therefrom by a gap, wherein
• said outer portion of said top plate moves relative to said bottom plate when a potential is applied between said top and bottom plates, and
• wherein said outer portion of said top plate is divided into first and second regions, said first region being connected to said second region by a spring.

A capacitor comprising:

• a bottom plate;
• a top plate having a center portion and an outer portion;
• and
• a support connected to said center portion of said top plate for positioning said top plate over said bottom plate and separated therefrom by a gap, wherein
• said outer portion of said top plate moves relative to said bottom plate when a potential is applied between said top and bottom plates, and
• wherein said outer portion of said top plate is sufficiently flexible to bend toward said bottom plate when said potential is applied between said top and bottom plates.