Process for continuous determination of the optical layer thickness of coatings
AssigneeBalzers Leybold Optics GmbH
InventorsTorsten Dieter, Rudolf Beckman, Alfons Zoller, Harro Hagedorn
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Abstract
Process for continuous determination of the optical layer thickness of coatings, which are applied on both sides of the spherical surfaces of concave convex lenses having different spherical radii R1 and R2. In this process a ray of light is beamed eccentrically during the coating process at each concave convex lens, and the reflection or transmission at the convex spherical surface and at the concave spherical surface is continuously measured with photodiodes, and the respective optical layer thickness is determined from the functional relationship between the reflection or the transmission and the optical layer thickness.
Claims13
A process for continuous determination of the optical layer thicknesses of coatings, which are applied on a convex spherical surface and on a concave spherical surface of a concave convex lens, the convex spherical surface having a radius R1, and the concave spherical surface having a radius R2, the process comprising the steps of:
- beaming a ray of light eccentrically during the coating process at each surface of the concave convex lens;
- continuously measuring the reflection or transmission at the convex spherical surface and at the concave spherical surface with photodiodes;
- and
- determining the optical layer thickness of the coating on the concave spherical surface based on the measured reflection or transmission at the concave spherical surface, and determining the optical layer thickness of the coating on the convex spherical surface based on the measured reflection or transmission at the convex spherical surface.
Dependencies are inferred from the claim text.