Methods for uncorrelated evaluation of parameters in parameterized mathematical model equations for lens retardance, in ellipsometry and polarimetry systems
AssigneeJ. A. Woollam Co. Inc.
InventorsBlaine D. Johs, Craig M. Herzinger, Ping He, Martin M. Ciphardt
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Abstract
Disclosed are ellipsometer and polarimeter systems which have multi-element input and output lenses that demonstrate essentially the same focal length at each wavelength in a spectroscopic range of wavelengths.
Claims2
An ellipsometer system comprising input and output lenses, said input and output lenses each being of multi-element construction, wherein, for each of said input and output lenses at least two elements thereof are made from different materials, such that in use the focal length for each wavelength in a range of wavelengths is essentially the same as that for every other wavelength, wherein said input and output lenses are characterized by a selection from the group consisting of:
- both demonstrating birefringence;
- one thereof demonstrating birefringence and the other not.
A polarimeter system comprising input and output lenses, said input and output lenses each being of multi-element construction, wherein, for each of said input and output lenses at least two elements thereof are made from different materials, such that in use the focal length for each wavelength in a range of wavelengths is essentially the same as that for every other wavelength, wherein said input and output lenses are characterized by a selection from the group consisting of:
- both demonstrating birefringence;
- one thereof demonstrating birefringence and the other not.
Dependencies are inferred from the claim text.