Monochromator and spectrometric method
AssigneeAdvantest Corporation
InventorIsao Tokumoto
Life of this patent
Estimating the term…
Abstract
In the monochromator, when measured beam which is diffracted by a plane diffraction grating is collected by a collimator to be returned, the measured beam is displaced by a displacement member in a direction parallel to rulings of the plane diffraction grating and is passed through a first cut-off slit having a slit of a predetermined width formed in a direction perpendicular to the direction of the rulings.
Claims9
A monochromator comprising a return mechanism for returning measured beam, which is diffracted by a plane diffraction grating and collected by a collimator,
- wherein the return mechanism having:
- return mirrors for returning said measured beam, disposed side-by-side in a wavelength sweep direction when said plane diffraction grating is rotated;
- a displacement member for displacing said measured beam in a direction of rulings of said plane diffraction grating, disposed in the vicinity of said return mirrors along a normal optical path;
- and
- a cut-off plate which is disposed in the vicinity of said return mirrors along said normal optical path.
A spectrometric method, wherein a monochromator for returning a measured beam, which is diffracted by a plane diffraction grating and collected by a collimator is used, the spectrometric method comprising the steps of:
- returning said measured beam by return mirrors disposed side-by-side in a wavelength sweep direction generated when said plane diffraction grating is rotated;
- displacing said measured beam in a direction of rulings of said plane diffraction grating by a displacement member disposed in the vicinity of said return mirrors along a normal optical path;
- and
- cutting off beam travel along an optical path other than said normal optical path by a cut-off plate which is disposed in the vicinity of said return mirrors along said normal optical path.
Dependencies are inferred from the claim text.