Latching mechanism for MEMS actuator and method of fabrication

A latching mechanism for a micro-electromechanical system (MEMS) actuator for applications including actuated devices in photonic switches or variable attenuators, including a thermal actuator having a pair of bent beams fabricated by said MEMS technique of semiconductive material for providing a beam junction, said beam junction having an actuator arm connected to said actuated device, said beam junction and arm having a rectilinear displacement motion for moving said actuated device by application of a drive voltage to said beams from a power supply, said arm being moved from a non-actuated to an actuated position, said latching mechanism comprising:

• latching means for maintaining said arm and actuated device in said actuated position even while a power supply interruption occurs, said latching means including at least a pair of clamps, actuated by bent beam actuators, juxtaposed on opposite sides of a portion of said arm, said clamps having a normally closed position in the absence of said drive voltage for stopping said arm motion and an open position upon an application of a drive voltage to said bent beams to allow said arm motion.