Method of fabricating row lines of a field emission array and forming pixel openings therethrough
AssigneeMicron Technology, Inc.
InventorAmmar Derraa
Life of this patent
Estimating the term…
Abstract
A method for fabricating row lines over a field emission array in which two mask steps are used to define row lines and pixel openings through selected regions of each row line. A first mask may be employed in the removal of dielectric material and conductive material from between pixel rows and from substantially above each pixel of the field emission array. A second mask may be used in the removal of semiconductor material from between the adjacent rows of pixels. Alternatively, a first mask may be employed in the definition of row lines, while a second mask may be used in the formation of pixel openings. Field emission arrays having a semiconductive grid and a relatively thin passivation layer exposed between adjacent row lines are also disclosed.
Claims27
A display device, comprising:
- a field emission array, comprising:
- a plurality of pixels;
- a passivation structure laterally adjacent each of said plurality of pixels;
- and
- a row line positioned over each row of pixels, each row line comprising:
- a layer comprising semiconductor material with at least one aperture formed therethrough over each pixel of said row of pixels;
- a layer comprising conductive material over said layer comprising semiconductor material and comprising at least one pixel opening formed therethrough, through which at least one corresponding aperture is exposed;
- and
- a layer comprising dielectric material over said layer comprising conductive material and comprising at least one other pixel opening formed therethrough, said at least one other pixel opening being at least partially superimposed over said at least one pixel opening, said passivation structure being exposed laterally adjacent said row line.
A display device, comprising:
- a field emission array, comprising:
- a passivation structure;
- a plurality of pixel rows, at least one emitter tip of each pixel of said plurality of pixel rows being laterally surrounded by said passivation structure;
- and
- a plurality of row lines, each of said plurality of row lines positioned over a row of said plurality of pixel rows with said passivation structure being at least partially exposed between adjacent row lines, each of said plurality of row lines comprising:
- a layer comprising conductive material over said passivation structure;
- a layer comprising dielectric material over said layer comprising conductive material;
- and
- a plurality of apertures through said layers, at least one emitter tip of each pixel being exposed through at least one aperture of said plurality of apertures.
A video display device, comprising:
- a field emission array, comprising:
- a passivation structure;
- at least one pixel row, each pixel of said at least one pixel row being exposed through and laterally surrounded by said passivation structure;
- and
- at least one row line over said at least one pixel row, said passivation structure at least partially exposed laterally adjacent said at least one row line, said at least one row line including a plurality of apertures through which at least one emitter tip of each pixel is exposed.
Dependencies are inferred from the claim text.