US 6,548,946 B1 · Electron beam generator

Abstract

An electron beam generator having circuit interconnections between individual components that are less prone to the adverse effects of thermal cycling. The generator includes a conductor rod within a guide tube, a center conductor secured to one end of the rod, and an outer conductor secured to the adjacent end of the guide tube. An opposite end of the center conductor has an integrally-formed flange extending radially therefrom. A first tower is secured and electrically connected to the flange, while a second and adjacent tower is electrically connected to the outer conductor. A filament is mounted to and between the first and second towers. A forward leg of the filament circuit comprises the conductor rod, the center conductor, the flange and the first tower, and the return leg of the filament circuit comprises the second tower and the guide tube interconnected by the outer conductor.

Claims20

Dependent claims

An electron beam generator having a filament circuit that includes a filament, a forward leg to the filament, and a return leg from the filament, the electron beam generator comprising:

a guide tube having an axial passage;
a conductor rod disposed within the axial passage, the conductor rod having a distal end;
a center conductor member having a first end and an oppositely-disposed second end, the first end being secured to the distal end of the conductor rod, the second end having an integrally-formed flange extending radially therefrom;
a first tower secured and electrically connected to the flange of the center conductor member;
an outer conductor member secured to the guide tube;
a second tower adjacent the first tower and electrically connected to the outer conductor member;
the filament mounted to and between the first and second towers;
and
a member adjacent to the filament for generating an electron beam when a sufficient current is applied to the filament via the forward leg of the filament circuit that comprises the conductor rod, the center conductor member, the flange and the first tower, the return leg of the filament circuit comprising the second tower and the guide tube interconnected by the outer conductor member.

6 more elements

An electron beam generator comprising:

a copper guide tube having an axial passage;
a copper conductor rod disposed within the axial passage, the conductor rod having a distal end defining an opening;
a stainless steel center conductor member having a first end and an oppositely-disposed second end, the first end being secured within the opening in the conductor rod with threads and a pin, the second end having an integrally-formed flange extending radially therefrom and an axial bore therein;
an ion catcher having a first end threaded into the bore of the center conductor member and an oppositely-disposed second end;
an insulator member secured to the flange of the center conductor member;
a conductive mounting plate secured to the insulator member;
a first filament tower formed of a stainless steel and secured to the flange so as to be disposed adjacent to the second end of the ion catcher;
a second filament tower formed of a stainless steel and secured to the mounting plate so that the second end of the ion catcher is between the first and second filament towers;
a filament mounted to and between the first and second filament towers so as to be axially aligned with the second end of the ion catcher;
a stainless steel outer conductor member surrounding the center conductor member and threaded and pinned to the guide tube;
means for clamping the mounting plate to the outer conductor member to electrically connect the second filament tower via the mounting plate to the outer conductor member;
and
a member adjacent to the filament for generating an electron beam when a sufficient current is applied to the filament via the conductor rod, the center conductor member, the flange and the first filament tower.

10 more elements

An electron beam generator installed in an electron beam physical vapor deposition coating apparatus, the electron beam generator comprising:

a copper guide tube having an internal axial passage and an external threaded portion at an end thereof;
a copper conductor rod disposed within the axial passage, the conductor rod having a distal end defining a threaded opening;
a stainless steel center conductor member having a first end and an oppositely-disposed second end, the first end being secured within the opening in the conductor rod with threads and a pin, the second end having an integrally-formed flange extending radially therefrom and a threaded axial bore therein;
a molybdenum ion catcher having a first end threaded into the bore of the center conductor member and an oppositely-disposed second end;
an insulator plate secured to the flange of the center conductor member, the insulator plate having a center portion disposed between the ion catcher and the second end of the center conductor member and a lateral portion oppositely disposed from the flange of the center conductor member;
a conductive mounting plate secured to the insulator member, the mounting plate having an opening therein;
a first filament tower formed of a stainless steel and secured to the flange and the insulator plate through the opening in the mounting plate, the first filament tower being disposed adjacent to the second end of the ion catcher;
a second filament tower formed of a stainless steel and secured to the mounting plate so that the second end of the ion catcher is between the first and second filament towers;
a tungsten filament mounted to and between the first and second filament towers so as to be axially aligned with the second end of the ion catcher;
a stainless steel outer conductor member surrounding the center conductor member and threaded and pinned to the guide tube;
a stainless steel cap surrounding the first and second filament towers and having an axial opening in which a portion of the filament is received, the cap being secured to the outer conductor member with camming means so as to clamp the mounting plate to the outer conductor member and electrically connect the second filament tower via the mounting plate to the outer conductor member;
and
a tungsten block adjacent to the filament for generating an electron beam when a sufficient current is applied to the filament via the conductor rod, the center conductor member, the flange and the first filament tower.

10 more elements

Dependencies are inferred from the claim text.

Electron beam generator

Life of this patent

Electron beam generator

Life of this patent

Abstract

Claims20