Array of membrane ultrasound transducers
AssigneeKoninklijke Philips Electronics N.V.
InventorsMareike Katharine Klee, Hans-Wolfgang Brand, Egon Krafczyk, Hans-Peter Loebl, Peter Klaus Bachmann
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Abstract
The invention relates to an array of ultrasound transducers which each comprise a membrane that is comprised of diamond or diamond-like carbon, a barrier structure, a piezoelectric layer, a first electrode and a second electrode. The barrier structure ensures strong adhesion of the piezoelectric layer to the barrier structure and thus to the device and that the piezoelectric layer only comprises a single phase. In addition, the barrier structure protects the membrane against oxidation/decomposition during the manufacturing process of piezoelectric layer. The invention further relates to an ultrasound transducer.
Claims5
An array of ultrasound transducers which each comprise a membrane (2) that is comprised of diamond or diamond-like carbon, a barrier structure (4), a piezoelectric layer (5), and a first and a second electrode (6,7) disposed on the same surface of the piezoelectric layer (5), wherein said barrier structure (4) comprises at least one layer of an oxide selected from the group of TiO2, MgO, Al2O3, HfO2, ZrTiO3, LaAlO3 and any combination of these compounds.
An ultrasound transducers which comprises a membrane (2) that is comprised diamond or diamond-like carbon, a barrier structure (4), a piezoelectric layer (5), and a first and a second electrode (6,7) disposed on the same surface of the piezoelectric layer (5), wherein said barrier structure (4) comprises at least one layer of an oxide selected from the group of TiO2, MgO, Al2O3, HfO2, ZrTiO4, LaAlO3 and any combination of these compounds.
Dependencies are inferred from the claim text.