Integrated circuitry and methods of forming circuitry
AssigneeMicron Technology, Inc.
InventorsKlaus Florian Schuegraf, Randhir P. S. Thakur
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AssigneeMicron Technology, Inc.
InventorsKlaus Florian Schuegraf, Randhir P. S. Thakur
Estimating the term…
In one aspect, the invention includes a method of forming circuitry comprising: a) forming a capacitor electrode over one region of a substrate: b) forming a capacitor dielectric layer proximate the electrode; c) forming a conductive diffusion barrier layer, the conductive diffusion barrier layer being between the electrode and the capacitor dielectric layer; d) forming a conductive plug over another region of the substrate, the conductive plug comprising a same material as the conductive diffusion barrier layer; and e) at least a portion of the conductive plug being formed simultaneously with the conductive diffusion barrier layer. In another aspect, the invention includes an integrated circuit comprising a capacitor and a conductive plug, the conductive plug and capacitor comprising a first common and continuous layer. In yet another aspect, the invention includes a circuit construction comprising: a) a substrate having a memory array region and a peripheral region that is peripheral to the memory array region; b) a capacitor construction over the memory array region of the substrate, the capacitor construction comprising a storage node, a capacitor dielectric layer and a cell plate layer; the capacitor dielectric layer being between the storage node and the cell plate layer; and c) an electrical interconnect over the peripheral region, the interconnect being electrically connected to the cell plate layer and extending between the cell plate layer and the substrate.
An integrated circuit comprising:
A circuit construction comprising:
An integrated circuit comprising:
An integrated circuit comprising:
A circuit construction comprising:
A circuit construction comprising:
A circuit construction comprising:
Dependencies are inferred from the claim text.