Means and method for controlling the intensity distribution of a laser beam
AssigneeMicrolas Lasersystem GmbH
InventorKlaus Brunwinkel
Life of this patent
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Abstract
An apparatus and a method for controlling the intensity distribution of a laser beam for processing a substrate provide that the laser radiation passes a homogenizing device, subsequent to which partial beams of the laser beam superimpose one another so that a homogenization of the intensity distribution of the laser beam is achieved. By arrangement of a diaphragm at a position in the radiation path of the laser beam, radiation is cut out off the partial beams superimposing one another in such a way that varied portions of at least some of the partial beams are cut out.
Claims24
Apparatus for controlling the intensity distribution of a laser beam incident upon a mask, comprising:
- a homogenizing device which is arranged in the radiation path of the laser beam, partitions the laser beam into a plurality of partial beams and superimposes the partial beams of the laser beam in such a way that homogenization of the intensity distribution of the laser beam is supported;
- and
- a diaphragm arranged in the radiation path of the laser beam between the homogenization device and the mask, the diaphragm for cutting radiation out of the partial beams in such a way that varied portions are cut out of at least some of those partial beams outside of a plane of superposition of the partial beams.
Method for controlling the intensity distribution of a laser beam incident upon a mask by means of a homogenizing device which is arranged in the radiation path of the laser beam such that it superimposes partial beams of the laser beam and, thereby, supports a homogenization of the intensity distribution of the laser beam, comprising the steps of:
- partitioning the laser beam into a plurality of partial beams at the homogenization device;
- and
- blocking radiation from the laser beam by means of a diaphragm between the homogenization device and the mask in such a way that varied portions are cut out of at least some of those partial beams outside of a plane of superposition of the partial beams.
Apparatus for controlling the intensity distribution of a laser beam by means of a homogenizing device, which is arranged in the radiation path of the laser beam, partitions the laser beam into a plurality of partial beams and superimposes the partial beams of the laser beam in such a way that homogenization of the intensity distribution of the laser beam is supported comprising:
- a diaphragm arranged in the radiation path of the laser beam after the homogenization device for cutting radiation our of the partial beams in such a way that varied portions are cut out of at least some of those partial beams outside of a plane of superposition of the partial beams;
- and
- a mask disposed in the radiation path of the laser beam after the diaphragm.
Dependencies are inferred from the claim text.