Synthesis of poly (imide-benzoxazole) copolymer
AssigneeIndustrial Technology Research Institute
InventorsShih-Jung Tsai, Steve Lien-Chung Hsu, Yuan-Pin Huang
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Abstract
The invention provides a poly(imide-benzoxazole) (PIBO) copolymer prepared from a trimellitic anhydride halide monomer and a bis(o-diaminophenol) monomer. The PIBO copolymer is characterized by the following recurring unit: wherein X is —O—, —S—, —C(CF3)2—, —C(CH3)2—, —CO—, —CH2—, —SO2—, —SO—, or deleted; and n is an integer. The PIBO copolymers of this invention are particularly useful as dielectric layers in semiconductor devices because they possess hydroxyl groups which create better adhesion to semiconductor substrates.
Claims27
A precursor of poly(imide-benzoxazole) prepared by reacting a trimellitic anhydride halide monomer and a bis(o-diaminophenol) monomer, comprising the following recurring unit:
- wherein
- X is —O—, —S—, —C(CF3)2—, —C(CH3)2—, —CO—, —CH2—, —SO2—, —SO—, or a chemical bond;
- and
- n is an integer from about 10 to about 1000.
A poly(imide-benzoxazole) copolymer, comprising the following recurring unit:
- wherein
- X is —O—, —S—, —C(CF3)2—, —C(CH3)2—, —CO—, —CH2—, —SO2—, —SO—, or a chemical bond;
- and
- n is an integer from about 10 to about 1000.
Dependencies are inferred from the claim text.