Method of forming a semiconductor device using a carbon doped oxide layer to control the chemical mechanical polishing of a dielectric layer

A method for forming a semiconductor device comprising:

• forming first and second raised members on a substrate, the first raised member being separated from the second raised member by a trench;
• filling the trench with a dielectric layer, the dielectric layer covering the first and second raised members when filling the trench, and having elevated sections with elevated surfaces where formed on the first and second raised members, and a recessed section with a recessed surface where filling the trench;
• forming a carbon doped oxide containing layer on the dielectric layer by feeding into a plasma enhanced chemical vapor deposition reactor at least one gas that provides a source of silicon, oxygen, and carbon, then operating the reactor at an appropriate temperature, pressure, radio frequency, and power;
• and
• applying a chemical mechanical polishing process to remove part of the dielectric layer and at least part of the carbon doped oxide containing layer, the chemical mechanical polishing process removing the dielectric layer at a significantly faster rate than it removes the carbon doped oxide containing layer.