Method of vertically integrating electric components by means of back contacting

A method of connecting a plurality of semiconductor components, wherein a method of connecting two semiconductor components is repeated iteratively, the method of connecting two semiconductor components having the following steps:

• providing in a first main surface of a first semiconductor substrate first component structures including first contact areas;
• forming in said first semiconductor substrate via holes filled with electrically conductive material and electrically insulated from said first semiconductor substrate, said via holes extending down to a second main surface of the first semiconductor substrate and being connected in an electrically conductive manner to said first contact areas via an electrically conductive connection material;
• forming on the second main surface of the first semiconductor substrate first lands which are connected in an electrically conductive manner to the first contact areas via the electrically conductive material in the via holes;
• providing a second semiconductor substrate having second component structures including second contact areas;
• forming second lands which are connected in an electrically conductive manner to the second contact areas;
• and
• connecting the first and the second semiconductor substrate in such a way that an electrically conductive as well as a mechanically stable connection between the two substrates is established exclusively via the first and the second lands;
• and
• wherein the respective nth semiconductor component plays the part of the first semiconductor component, and the stack of (n−1) combined semiconductor components plays the part of the second semiconductor component.