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US 6,548,321 B1Granted
Method of anodically bonding a multilayer device with a free mass
AssigneeThe Charles Stark Draper Laboratory, Inc.
InventorWilliam David Sawyer
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Abstract
A method of anodically bonding a multilayer device with a free mass includes positioning a support layer on either side of a free mass structure including a free mass with an electrode on each layer proximate the free mass; connecting both electrodes and the free mass to a node at a floating potential and applying a voltage across the layers and free mass structure to bond at least one of the layers to the free mass structure.
Claims9
A method of anodically bonding a multilayer device with a free mass comprising:
- positioning at least one support layer on either side of a free mass structure including a free mass with an electrode proximate to the free mass on said at least one support layer;
- connecting said electrode and the free mass to a node at a floating potential;
- and
- applying a voltage across the at least one layer and free mass structure to bond the at least one support layer to the free mass structure.
1 more element
Dependencies are inferred from the claim text.