Photoelectric conversion element and method for manufacturing the same

A method for manufacturing a photoelectric conversion element, comprising the steps of:

• forming a photoelectric conversion portion having a semiconductor layer equipped on a substrate and an electrode equipped on the semiconductor layer;
• forming an insulating layer having an opening for the electrode of the photoelectric conversion portion;
• forming a contact electrode electrically connected to the electrode of the photoelectric conversion portion through the opening of the insulating layer;
• forming a plurality of the photoelectric conversion portion on the same substrate;
• forming a plurality of openings at the insulating layer corresponding to each photoelectric conversion portion, wherein the each opening is positioned within each area which aligns in a slanting direction or aligns longitudinally or laterally with more than one area of space in between the areas the openings are positioned, and
• forming a plurality of contact electrodes, respectively, corresponding to each photoelectric conversion portion.

A method for manufacturing a photoelectric conversion element comprising steps of:

• forming a photoelectric conversion portion having a semiconductor layer equipped on a substrate and an electrode equipped on the semiconductor layer;
• forming an insulating layer having an opening for the electrode of the photoelectric conversion portion;
• forming a contact electrode electrically connected to the electrode of the photoelectric conversion portion through the opening of the insulating layer;
• forming a position matching portion for connecting an electrode of the photoelectric conversion portion and the contact electrode;
• and
• connecting the contact electrode to the electrode of the photoelectric conversion portion electrically by using the position matching portion.

A method for manufacturing a photoelectric conversion element comprising the steps of:

• forming a photoelectric conversion portion having a semiconductor layer equipped on a substrate and an electrode equipped on the semiconductor layer;
• forming an insulating layer having an opening for the electrode of the photoelectric conversion portion;
• forming a contact electrode electrically connected to the electrode of the photoelectric conversion portion through the opening of the insulating layer;
• forming a substrate side position matching portion having a metallic layer;
• and
• connecting the metallic layer to the contact electrode.

A method for manufacturing a photoelectric conversion element comprising the steps of:

• forming a photoelectric conversion portion having a semiconductor layer equipped on a substrate and an electrode equipped on the semiconductor layer;
• forming an insulating layer having an opening for the electrode of the photoelectric conversion portion;
• and
• forming a contact electrode electrically connected to the electrode of the photoelectric conversion portion through the opening of the insulating layer;
• forming the contact electrode on a base, and
• connecting the contact electrode to the electrode of the photoelectric conversion portion electrically.

A method of manufacturing a photoelectric element, comprising the steps of:

• forming a photoelectric conversion portion having a semiconductor layer equipped on a substrate and an electrode equipped on the semiconductor layer;
• forming an insulating layer having an opening for the electrode of the photoelectric conversion portion;
• forming a contact electrode electrically connected to the electrode of the photoelectric conversion portion through the opening of the insulating layer;
• forming the electrode on the semiconductor layer;
• removing the semiconductor layer selectively by using the electrode as a mask;
• forming a plurality of the photoelectric conversion portion on the same substrate;
• forming a plurality of openings at the insulating layer corresponding to each photoelectric conversion portion, wherein the each opening is positioned within each area which aligns in a slanting direction or aligns longitudinally or laterally with more than one area of space in between the areas the openings are positioned;
• forming a plurality of contact electrodes, respectively, corresponding to each photoelectric conversion portion;
• forming a position matching portion for connecting the electrode of the photoelectric conversion portion and the contact electrode;
• connecting the contact electrode to the electrode of the photoelectric conversion portion electrically by using the position matching portion;
• forming a substrate side position matching portion having a metallic layer;
• connecting the metallic layer to the contact electrode;
• forming the contact electrode on a base;
• and
• connecting the contact electrode to the electrode of the photoelectric conversion portion electrically.