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US 6,548,313 B1Granted
Amorphous carbon insulation and carbon nanotube wires
AssigneeIntel Corporation
InventorsKramadhati V. Ravi, Eric C. Hannah
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Abstract
An apparatus includes a carbon nanotube coupled with a first device and a second device of an integrated circuit, wherein electrons can flow between the first device and the second device along the carbon nanotube. Doped amorphous carbon is deposited on the integrated circuit structure. The doped amorphous carbon is planarizing and patterned to form a trench. Carbon based precursor material is deposited in the trench. The carbon based precursor material is converted into the carbon nanotube, wherein the carbon nanotube connects the first device with the second device.
Claims13
A method comprising:
- depositing doped amorphous carbon on an integrated circuit structure;
- planarizing the doped amorphous carbon;
- patterning the doped amorphous carbon to form a trench;
- depositing carbon based precursor material in the trench, wherein the trench was formed by the patterning;
- and
- converting the carbon based precursor material into a carbon nanotube, wherein the carbon nanotube connects a first device with a second device.
3 more elements
Dependencies are inferred from the claim text.