Pellicle
AssigneeAsahi Glass Company, Limited
InventorsIkuo Matsukura, Naoko Shirota, Jun Irisawa
Life of this patent
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Abstract
A pellicle for a photolithographic patterning process by means of a light having a wavelength of at most 200 nm, comprising a frame and a pellicle membrane bonded to the frame by means of an adhesive, wherein the pellicle membrane or the adhesive comprises the following fluorine-containing polymer (A): fluorine-containing polymer (A): a substantially linear fluorine-containing polymer having a chain of carbon atoms as the main chain, and containing as carbon atoms in its main chain, a carbon atom having one or two hydrogen atoms bonded thereto and a carbon atom having no hydrogen atom bonded thereto and having a fluorine atom or a fluorine-containing organic group bonded thereto.
Claims11
A pellicle comprising a frame and a pellicle membrane bonded to the frame by means of an adhesive, wherein the pellicle membrane comprises the following fluorine-containing polymer (A):
- a polymer or copolymer having monomer units formed by cyclic polymerization of monomer (d) represented by CH2═CR7—Q—CR8═CF2, wherein each of R7 and R8, which are independent of each other, is a hydrogen atom, a fluorine atom or a monovalent fluorine-containing organic group, and Q is a bivalent fluorine-containing organic group, and wherein the adhesive comprises a fluorine-containing polymer having a chain of carbon atoms as the main chain, carbon atoms having one or two hydrogen atoms bonded thereto and carbon atoms having no hydrogen atom bonded thereto and having a fluorine atom or a fluorine-containing organic group bonded thereto.
A pellicle comprising a frame and a pellicle membrane bonded to the frame by means of an adhesive wherein the pellicle membrane comprises the following fluorine-containing polymer (A):
- a polymer having monomer units formed by cyclic polymerization of monomer (d) represented by CH2═CR7—Q—CR8═CF2, wherein each of R7 and R8, which are independent of each other, is a hydrogen atom, a fluorine atom or a monovalent fluorine containing organic group, and Q is a bivalent fluorine-containing organic group, and wherein the adhesive comprises a propylene/vinylidene fluoride/tetrafluoroethylene copolymer.
A pellicle comprising a frame and a pellicle membrane bonded to the frame by means of an adhesive, wherein the pellicle membrane comprises the following fluorine-containing polymer (A):
- a fluorine-containing polymer having a chain of carbon atoms as the main chain, and containing as carbon atoms in its main chain, carbon atoms having one or two hydrogen atoms bonded thereto and carbon atoms having no hydrogen atom bonded thereto and having a fluorine atom or a fluorine-containing organic group bonded thereto, and wherein the adhesive comprises a propylene/vinylidene fluoride/tetrafluoroethylene copolymer.
A pellicle comprising a frame and a pellicle membrane bonded to the frame by means of an adhesive, wherein the adhesive comprises a propylene/vinylidene fluoride/tetrafluoroethylene copolymer.
Dependencies are inferred from the claim text.