Method of fabricating a spin valve/GMR sensor having a synthetic antiferromagnetic layer pinned by Mn-alloy

A method of fabricating a spin valve sensor comprising:

• sequentially depositing, without breaking vacuum, a seed layer and an antiferromagnetic layer, wherein sequentially depositing the seed layer and the antiferromagnetic layer further comprises:
• depositing a seed layer on a substrate;
• depositing a Mn-alloy layer of the antiferromagnetic layer directly on top of the seed layer;
• and
• depositing a buffer layer of the antiferromagnetic layer directly on top of the Mn-alloy layer;
• annealing the seed layer, the Mn-alloy layer and the buffer layer;
• etching a portion of the buffer layer;
• depositing a synthetic antiferromagnetic layer on top of the buffer layer of the antiferromagnetic layer, wherein depositing the synthetic antiferromagnetic layer further comprises:
• depositing a first CoFe layer directly on top of the buffer layer;
• depositing an Ru layer directly on top of the first CoFe layer;
• and
• depositing a second CoFe layer directly on top of the Ru spacer layer;
• depositing a spacer layer directly on top of the second CoFe layer;
• and
• depositing a free layer directly on top of the spacer layer.