Process liquid dispense method and apparatus

A method of producing a layer of a process liquid on a surface, comprising:

• rotating said surface at a first speed;
• decelerating said surface to a second speed, wherein said second speed is sufficient to produce a desired final thickness of said layer of process liquid on said surface;
• dispensing said process liquid on said surface during said deceleration for an appreciable time and in an effective amount sufficient to produce a layer of desired final thickness on said surface;
• and
• terminating said dispensing of said process liquid.

A method of producing a layer of a process liquid on a surface, comprising:

• dispensing said process liquid on said surface;
• rotating said surface at a first speed to distribute an effective amount of said process liquid to substantially wet said surface;
• decelerating said surface from said first speed to a second speed during said dispensing, said dispensing occurring during deceleration for an appreciable time and in an effective amount sufficient to produce a layer of desired thickness on said surface, said second speed selected to produce a layer of desired final thickness on said surface;
• and
• rotating said surface at said second speed to distribute an effective amount of said process liquid to produce a layer of said process liquid on said surface.

A method of producing a layer of a photoresist on a surface, comprising:

• dispensing said photoresist on said surface;
• rotating said surface at a first speed;
• and
• decelerating said surface to a second speed during said dispensing, said dispensing occurring during deceleration for an appreciable time and in an effective amount sufficient to produce a layer of desired final thickness on said surface, said second speed selected to produce a layer of desired final thickness on said surface.

A method of producing a layer of a photoresist on a surface, comprising:

• rotating said surface at a first speed;
• dispensing said photoresist on said surface during said rotation;
• and
• decelerating said surface to a second speed during said dispensing, said dispensing occurring during deceleration for an appreciable time and in an effective amount sufficient to produce a layer of desired final thickness on said surface, said second speed selected to produce a layer of desired final thickness on said surface.