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AssigneeCanon Kabushiki Kaisha
InventorsTadashi Hori, Masahiro Kanai, Koichiro Moriyama, Hiroshi Shimoda, Hiroyuki Ozaki
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A vacuum-processing apparatus comprising a vacuum vessel, a processing chamber arranged in the vacuum vessel and a heater for heating a circumferential wall of the processing chamber, wherein a substrate is arranged in the processing chamber and the substrate is vacuum-processed in the processing chamber, characterized in that the vacuum-processing apparatus has a cooling plate arranged at a position to oppose the circumferential wall of the processing chamber for cooling the circumferential wall of the processing chamber, and a mechanism for moving the cooling plate so as to change a distance between the cooling plate and the circumferential wall of the processing chamber.
A vacuum-processing apparatus comprising a vacuum vessel whose inside being capable of being evacuated, a processing chamber arranged in said vacuum vessel and a heater for heating a circumferential wall of said processing chamber, wherein a substrate is arranged in said processing chamber and said substrate is vacuum-processed in said processing chamber while maintaining said substrate at a prescribed temperature and introducing a processing gas therein under reduced pressure, characterized in that said vacuum-processing apparatus has a cooling plate outside said processing chamber arranged at a position to oppose said circumferential wall of said processing chamber and a mechanism for moving said cooling plate so as to change a distance between said cooling plate and said circumferential wall of said processing chamber.
Dependencies are inferred from the claim text.