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US 6,547,618 B1Granted
Seal and method of sealing field emission devices
AssigneeMotorola, Inc.
InventorsAlan L. James, Kevin M. Reinhart
Life of this patent
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Abstract
A method of fabricating a high vacuum device by providing two major, parallel spaced apart glass sides in a substantial vacuum, forming a continuous edge between the sides and forming a tack with a metallic diffusion bond between the sides. The metallic diffusion bond is formed of materials that bond and cure faster than the material of the continuous edge so that the tack holds the sides in a fixed position while the continuous edge is curing.
Claims14
A method of fabricating a high vacuum device, comprising:
- depositing a metallic film onto a first major face of a tack;
- affixing a second major face of the tack to a first major side of the high vacuum device with a high temperature resistant adhesive;
- depositing a thick layer of contact metal onto a surface of a second major side of the high vacuum device;
- depositing a vacuum sealing material on edges of one of the first and second major sides;
- placing the first and second major sides in a vacuum chamber with the thick layer of contact metal opposing the metallic film on the tack;
- creating a substantial vacuum;
- heating the high vacuum device in the substantial vacuum sufficiently to bond the metallic film and the contact metal and to achieve a vacuum sealing by the vacuum sealing material;
- and
- removing the high vacuum device from the vacuum chamber while the vacuum sealing material is in a low viscosity state.
6 more elements
A method of fabricating a high vacuum device, comprising:
- attaching a tack device having a metallic film on an exposed face to a first of two major sides of a high vacuum device using an attachment technique that maintains the attachment at bonding and curing temperatures;
- placing the two major sides in a vacuum chamber with the metallic film on the tack aligned to a thick layer of contact metal on a second of the two major sides;
- heating the high vacuum device in a substantial vacuum to bond together the metallic film and the contact metal and to achieve a vacuum seal by the edge vacuum sealant of the high vacuum device;
- and
- removing the high vacuum device from the vacuum chamber while the edge vacuum sealant is in a low viscosity state.
2 more elements
A method of fabricating a high vacuum device, comprising:
- placing two major sides of the high vacuum device in a vacuum chamber;
- heating the high vacuum device in a substantial vacuum to bond the two major sides together with at least one tack located between the two major sides that bonds to both of the major sides, wherein bonding to at least one of the major sides is a metallic bond formed by the heating, and wherein the bonded tack prevents subsequent misalignment of the two major sides, and wherein the heating sufficiently initiates a sealing process of an edge vacuum sealant of the high vacuum device to maintain a vacuum seal at atmospheric pressure;
- and
- removing the high vacuum device from the vacuum chamber while the edge vacuum sealant is in a low viscosity state.
1 more element
Dependencies are inferred from the claim text.