Methods of measuring moving objects and reducing exposure during wavefront measurements
AssigneeWaveFront Sciences, Inc.
InventorsDaniel R. Neal, Christopher Burak, Daniel R. Hamrick
Life of this patent
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Abstract
Metrology is performed using short, temporally resolved measurements in order to “freeze” the deformation of the object at a particular instant in time. The pulsed light beams are used to conduct metrology of moving objects and objects which are moved relative to the detector for measurement thereof. The motion may be translational, spiral and/or rotational. The duty cycle of the light source may be varied to in accordance with the control of the operation of the detector to perform metrology using a reduced total exposure of an object, while increasing the amount of light available for the measurement.
Claims26
A method for performing metrology on an object comprising:
- controlling a light source to output a pulsed light beam;
- providing the pulsed light beam to the object;
- dividing the pulsed light beam having interacted with the object into a plurality of spots;
- controlling operation of a detector in accordance with a synchronization pulse from the light source, the detector converting the plurality of spots into electronic signals;
- synchronizing data acquisition electronics to the light source and the detector, the data acquisition electronics integrating the electronic signals from the detector for a single pulse from the light source;
- and
- computing characteristics of the pulsed light beam having interacted with the object in a single pulse from integrated electronic signals.
A method of determining wave aberrations of the eye, comprising:
- providing pulsed light to produce a light spot on a retina of an eye;
- receiving an image of light backscattered from the light spot on the retina of the eye and for creating aerial images of the light spot;
- detecting the aerial images from the lenslet array;
- and
- determining wave aberrations of the eye from the aerial images.
A wavefront sensor for determining the wave aberrations of the eye comprising:
- a lenslet array adapted to receive an image of light backscattered from a light spot on a retina of the eye and for creating aerial images of the light spot;
- a detector adapted to receive the aerial images from the lenslet array;
- and
- a pulsed light source adapted to provide light to the retina and to increase a peak intensity of the light for forming the aerial images,
- wherein the detector is synchronized with the pulsed light source.
Dependencies are inferred from the claim text.