US 6,546,640 B2 · Traverse linearity compensation method and rotational accuracy compensation method of measuring device

Abstract

A compensation method according to the present invention includes: a traverse linearity data calculating step for measuring a master workpiece (MW) of which profile data is value-specified in advance while moving a sensor (7) using a linear movement mechanism (4, 5) of a measuring device (1) and for subtracting the previously value-specified profile data from the measurement data of the master workpiece to obtain a traverse linearity data of the linear movement mechanism; a workpiece measurement data calculating step for measuring the workpiece while moving the sensor by the linear movement mechanism of the measuring device to obtain a measurement data of the workpiece; and a workpiece profile calculating step for subtracting the traverse linearity data from the workpiece measurement data to obtain a true value data of the workpiece.

Claims7

Dependent claims

A traverse linearity compensation method of a measuring device having a linear movement mechanism, the method comprising:

a traverse linearity data calculating step for measuring a master workpiece of which profile data is value-specified in advance by a master workpiece measuring device for measuring errors in the master workpiece while moving a sensor by the linear movement mechanism of the measuring device and for subtracting the value-specified profile data from the master workpiece measurement data to obtain a traverse linearity data of the linear movement mechanism;
a workpiece measurement data calculating step for measuring a workpiece while moving the sensor by the linear movement mechanism of the measuring device to obtain a measurement data of the workpiece;
and
a workpiece profile calculating step for subtracting the traverse linearity data from the workpiece measurement data to obtain a true value data of the workpiece.

1 more element

A rotational accuracy compensation method of a measuring device having a rotary mechanism, the method comprising:

a rotational accuracy data calculating step for measuring a profile of a master workpiece by a sensor while the rotary mechanism of the measuring device rotates a master workpiece of which profile data at a data acquisition position is value-specified in advance by a master workpiece measuring device for measuring errors in the master workpiece and for subtracting the value-specified profile data from the master workpiece measurement data to obtain a rotational accuracy data of the rotary mechanism;
a workpiece measurement data calculating step for measuring the profile of the workpiece by the sensor while rotating the workpiece by the rotary mechanism, of the measuring device to obtain a measurement data of the workpiece;
and
a workpiece profile calculating step for subtracting the rotational accuracy data from the workpiece measurement data to obtain a true value data of the workpiece.

1 more element

Dependencies are inferred from the claim text.

Traverse linearity compensation method and rotational accuracy compensation method of measuring device

Life of this patent

Traverse linearity compensation method and rotational accuracy compensation method of measuring device

Life of this patent

Abstract

Claims7