Structure equipped with electrical contacts formed through the substrate of this structure and process for obtaining such a structure
AssigneeCommissariat a l'Energie Atomique
InventorsStéphane Caplet, Marie-Thérèse Delaye
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Abstract
A process for manufacturing a structure equipped with at least one electrical contact, including forming on a substrate a first layer, forming on a front side of the first layer the structure equipped with at least one electrical contact, forming at least one hole though the substrate revealing a rear side of the first layer, and forming an electrical contact to the rear side in a cavity overhung by an edge of the at least one hole closest to the first layer, the edge allowing for electrical insulation of the electrical contact from the substrate.
Claims11
Process for manufacturing a structure equipped with at least one electrical contact, comprising:
- forming on a substrate a first layer;
- forming on a front side of the first layer said structure equipped with at least one electrical contact;
- forming at least one hole though the substrate revealing a rear side of the first layer;
- forming a cavity at an end of said hole close to said first layer, said cavity formed transverse to an axial direction of said hole so as to form an overhanging edge opposite the first layer;
- and
- forming an electrical contact to said rear side of the first layer, the overhanging edge allowing for electrical insulation of the electrical contact from the substrate.
Dependencies are inferred from the claim text.