Laser irradiating apparatus
AssigneesSemiconductor Energy Laboratory Co., Ltd., Ishikawajima-Harima Heavy Industries Co., Ltd.
InventorsKoichiro Tanaka, Norihito Kawaguchi, Kenichiro Nishida
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Abstract
Disclosed is a laser irradiating apparatus which forms a laser beam having an improved and uniform energy distribution on or near its irradiation surface in case where a laser oscillator having a high coherence is used. The laser irradiating apparatus forms a laser beam having a cyclic energy distribution by intentionally forming interference fringes on or near the irradiation surface by utilizing a high coherence, so that the energy distribution of the laser beam is cyclically repeated. From a macro viewpoint, such a laser beam can be considered as having a uniform energy distribution.
Claims5
A laser irradiating apparatus comprising:
- an irradiation surface;
- a pulse oscillation type laser;
- and
- an optical system for splitting a first laser beam from said pulse oscillation type laser into a plurality of first sub laser beams as a light source on or near said irradiation surface and synthesizing said sub laser beams on or near said irradiation surface to cause interference, thereby forming a second laser beam having a cyclic energy distribution in one direction,
- said irradiation surface being movable in said one direction in relative to said second laser beam.
A laser irradiating apparatus comprising:
- an irradiation surface;
- a pulse oscillation type laser;
- and
- an optical system for splitting a laser beam from said pulse oscillation type laser into a plurality of sub laser beams as a light source on or near said irradiation surface and synthesizing said sub laser beams on or near said irradiation surface to cause interference, thereby forming a linear beam having a cyclic energy distribution in a direction of a minor axis,
- said irradiation surface being movable in said direction of said minor axis in relative to said linear laser beam.
A laser irradiating apparatus comprising:
- an irradiation surface;
- a pulse oscillation type laser;
- and
- an optical system for splitting a laser beam from said pulse oscillation type laser into a plurality of sub laser beams as a light source on or near said irradiation surface and synthesizing said sub laser beams on or near said irradiation surface to cause interference, thereby forming a linear beam having a cyclic energy distribution in a direction of a major axis,
- said irradiation surface being movable in said direction of said major axis in relative to said linear laser beam.
Dependencies are inferred from the claim text.