# US 6,543,980 B2 · Teaching tool for a robot arm for wafer reaction ovens

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- Number: US 6,543,980 B2
- Document ID: US6543980B2
- Status: Granted
- Kind: B2
- Application number: 09/863,329
- Filed: 2001-05-24
- Published: 2002-06-20
- Granted: 2003-04-08
- Earliest claimed: 2000-12-15
- Assignees: Mosel Vitelic, Inc.
- Inventors: Hsien Hsiang Lin; Thanku Shieh; Wen-Ching Wu; Hsiao-Ping Hsieh
- Web page: https://patentgrep.com/patent/US6543980B2

## CPC

- H10P 72/50: for positioning, orientation or alignment
- H10P 72/0606: {Position monitoring, e.g. misposition detection or presence detection}
- G05B 2219/39014: Match virtual world with real world
- G05B 2219/39041: Calibrate only for end position
- G05B 2219/45031: Manufacturing semiconductor wafers
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- G05B: CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS (systems for controlling or regulating non-electric variables G05D; systems for regulating electric or magnetic variables G05F; control devices or systems insofar as characterised by mechanical features only G05G)

## Abstract

A teaching tool for a robot arm for wafer reaction ovens is provided to anchor the robot arm with respect to a tray located inside a reaction oven. The teaching tool provides an upper flange for maintaining a spacing between a handle of the robot arm and a door of the oven, a position width for keeping the teaching tool aligning with a center line of the tray, and a lower tunnel aligning with the center line for allowing a blade of the robot arm to contact closely and horizontally from a lower position and thus for maintaining a position height between the blade and a floor of the reaction oven. By providing the teaching tool, easy blind calibration with multiple contact points between the robot arm and the oven can be performed so that possible efficiency down and cost up from an ill-calibration can be reduced to a minimum.

## Claims

### Claim 1

A teaching tool for a robot arm for wafer reaction ovens, as a unique piece for being applied while calibrating a robot arm to anchor the robot arm with a blade with respect to a tray located inside a reaction oven, comprising:
an upper flange having a width thereof to maintain a spacing between a handle of the robot arm and a door of the reaction oven while in calibration;
an insert block having a position width thereof to keep the teaching tool aligned with a center line of the tray by plugging a central passage of the tray;
a pair of lower flanges, for forming therebetween a lower tunnel aligning with the center line, the lower tunnel allowing the blade to contact closely and horizontally therefrom below and thus to maintain a position height between the blade and a floor of the reaction oven; and
wherein, during calibration, the teaching tool is placed at an upper conjunction between the handle of the robot arm and the blade.

### Claim 2 (depends on 1)

The teaching tool for a robot arm for wafer reaction ovens according to claim 1, wherein said lower tunnel is complementary in shape to said blade at said upper conjunction.

### Claim 3 (depends on 1)

The teaching tool for a robot arm for wafer reaction ovens according to claim 1, wherein said upper flange has a rectangular cross section.

### Claim 4 (depends on 1)

The teaching tool for a robot arm for wafer reaction ovens according to claim 1, wherein said insert block has a height equal to an internal height of said reaction oven.

### Claim 5 (depends on 1)

The teaching tool for a robot arm for wafer reaction ovens according to claim 1, wherein said insert block further includes thereof a top surface for contacting with a ceiling of said reaction oven while in calibration.

### Claim 6 (depends on 1)

The teaching tool for a robot arm for wafer reaction ovens according to claim 1, wherein said upper flange and said handle are surface-contacted and said upper flange and said door are also surface-contacted.

### Claim 7 (depends on 1)

The teaching tool for a robot arm for wafer reaction ovens according to claim 1, wherein said teaching tool and said central passage of said tray are surface-contacted for maintaining said position width.