Apparatus and methods for substantial planarization of solder bumps
AssigneeMicron Technology, Inc.
InventorDavid R. Hembree
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AssigneeMicron Technology, Inc.
InventorDavid R. Hembree
Estimating the term…
Apparatus and methods for substantial planarization of solder bumps. In one embodiment, an apparatus includes a planarization member engageable with at least some of the plurality of outer surfaces to apply a planarization action on one or more of the outer surfaces to substantially planarize the plurality of outer surfaces, and a securing element to securely position the bumped device during engagement with the planarization member. Through application of “additive” and/or “subtractive” processes, the solder balls are substantially planarized. In alternate embodiments, the planarization member includes a cutting tool and the planarization action comprises a milling action; or the planarization member includes a heated platen and the planarization action comprises a thermo-mechanical deformation action; or the planarization member includes an abrasive surface and the planarization action comprises a grinding action; or the planarization member includes a chemical solution and the planarization action comprises a chemical reaction; or the planarization member includes a solder deposition device and the planarization action comprises a solder. In a further embodiment, an apparatus includes a load device to urge the at least some outer surfaces of the bumped device into engagement with the planarization member.
A method of substantially planarizing an array of solder bumps attached to a bumped device, comprising:
A method of substantially planarizing an array of solder bumps attached to a bumped device, comprising adjusting the thickness of at least some of the solder bumps by applying a centrifugal force using a centrifuge to force a substantially flat surface into engagement with the at least some of the solder bumps so that all of the solder bumps in the array project from the bumped device by substantially the same distance.
A bumped device having an array of substantially planarized solder bumps created by a method comprising:
Dependencies are inferred from the claim text.