Laser machining apparatus
AssigneeCanon Kabushiki Kaisha
InventorsKenji Hirose, Shinji Ueda
Life of this patent
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Abstract
A system is provided with a laser beam source, a reflector mirror that is a reflecting member for reflecting a laser beam emitted from the laser beam source, a spindle motor that is a rotating and driving unit for rotating and driving the reflector mirror, and a f-θ lens that is a converging unit for converging a laser beam reflected by the reflector mirror. The reflector mirror is rotated and driven under the condition that its normal line is mounted to be slanted to a rotary axis of a spindle motor. The optical axis of the reflector beam of the laser beam introduced into the reflector mirror is deflected so as to take a precession. A circular track is depicted on the surface of a workpiece to be machined by a beam spot converged by the f-θ lens to perform the machining work.
Claims4
A laser machining apparatus comprising:
- a laser beam source;
- a reflector mirror for reflecting a laser beam emitted from said laser beam source;
- a rotating and driving motor for rotating and driving said reflector mirror;
- and
- a converging optical system for converging said laser beam reflected by said reflector mirror,
- wherein said reflector mirror is mounted so that a normal line of said reflector mirror is slanted to a rotary axis of said rotating and driving motor, and takes a precession about the axis of said rotating and driving motor.
Dependencies are inferred from the claim text.