Use of multiple laser sources for rapid, flexible machining and production of vias in multi-layered substrates

A method of ablating a material, the method comprising the steps of:

• generating a first plurality of pulses from a first ultraviolet laser system, said first plurality of pulses having a first pulse repetition rate, a first average peak power per pulse, and a first average pulse duration, wherein said first ultraviolet laser system is further comprised of at least a first laser source;
• passing said first plurality of pulses through a first EO modulator, wherein said first plurality of pulses has a first polarization when said first EO modulator is of a first state and wherein said first plurality of pulses has a second polarization when said first EO modulator is of a second state;
• directing said first plurality of pulses to a polarizing beam splitter, wherein said polarizing beam splitter passes said first plurality of pulses with said first polarization along a first beam path and wherein said polarizing beam splitter reflects said first plurality of pulses with said second polarization along a second beam path;
• generating a second plurality of pulses from a second ultraviolet laser system, said second plurality of pulses having a second pulse repetition rate, a second average peak power per pulse, and a second average pulse duration, wherein said second ultraviolet laser system is further comprised of at least a second laser source;
• passing said second plurality.of pulses through a second EO modulator, wherein said second plurality of pulses has a third polarization when said second EO modulator is of a first state and wherein said second plurality of pulses has a fourth polarization when said second EO modulator is of a second state;
• directing said second plurality of pulses to said polarizing beam splitter, wherein said polarizing beam splitter passes said second plurality of pulses with said third polarization along said first beam path and wherein said polarizing beam splitter reflects said second plurality of pulses with said fourth polarization along said second beam path;
• directing said first plurality of pulses within said first beam path and said second plurality of pulses within said first beam path to a first ablation site with a first beam delivery system;
• and
• directing said first plurality of pulses within said second beam path and said second plurality of pulses within second beam path to a second ablation site with a second beam delivery system.

A multi-layer material via drilling system, comprising

• a first solid-state laser comprised of at least a first laser source;
• a first nonlinear optical converter, wherein said first solid-state laser in conjunction with said first nonlinear optical converter outputs ultraviolet radiation;
• a first modulator producing a first plurality of pulses from said ultraviolet radiation output by said first solid-state laser and said first nonlinear optical converter, said first plurality of pulses having a first pulse repetition rate of 30 kilohertz or less and a first average pulse duration;
• a beam splitter, wherein said first plurality of pulses are directed at said beam splitter, wherein said beam splitter directs at least a portion of said first plurality of pulses along a first output beam path;
• a first beam delivery system, wherein said portion of said first plurality of pulses directed along said first output beam path pas through said first beam delivery system;
• a first multi-layered target material, wherein said portion of said plurality of pulses passing through said first beam delivery system are directed to a location on said first multi-layered target material, wherein said portion of said first plurality of pulses ablate a portion of said first multi-layered target material to form a via, said via selected from the group consisting o through-hole vias and blind vias;
• a second solid-state laser comprised of at least a second laser source;
• a second nonlinear optical converter, wherein said second solid-state laser in conjunction with said second nonlinear optical converter outputs ultraviolet radiation;
• a second modulator producing a second plurality of pulses from said ultraviolet radiation output by said second solid-state laser and said second nonlinear optical converter, said second plurality of pulses having a pulse repetition rate substantially equivalent to said first pulse repetition rate, wherein said second plurality of pulses are delayed from said first plurality of pulses by a delay period that is less than said first average pulse duration, wherein said second plurality of pulses are directed at said beam splitter, wherein said beam splitter directs at least a portion of said second plurality of pulses along said first output bam path through said first beam delivery system to said location on said said first multi-layered target material, wherein said portion of said second plurality of pulses assist in ablating said portion of said first multi-layered target-material.