Method of and apparatus for fluid sealing, while electrically contacting, wet-processed workpieces
AssigneeAll Wet Technologies, Inc.
InventorArthur Keigler
Life of this patent
Estimating the term…
Abstract
A method and apparatus for fluid sealing the underside of a workpiece, such as a semiconductor wafer and the like, during wet-processing such as electrodeposition and the like, employing an elastomeric encased ring of flexible fingers against which the periphery of the workpiece underside is forced to deflect the fingers downwardly and engage a peripheral sealing bead against the underside periphery of the workpiece; and where electrical contact with the workpiece is desired, resiliently engaging electrical contact tips protruding through peripheral openings in the elastomeric covering within the sealing ring, with the underside periphery of the workpiece.
Claims11
A method of fluid sealing while electrically contacting the underside perimeter of wet-processed workpieces, that comprises, providing an elastomer-covered ring inwardly terminating in an upwardly projecting peripheral elastomeric sealing bead, and covering an assembly of inwardly extending flexible fingers each (having an upwardly projecting terminal electrical contact and upon the elastomer-covered inner ends of which fingers the perimeter of the underside of the workpiece is to engage along the sealing bead during the wet processing of the workpiece;
- resting the underside of the workpiece within the ring and forcing the underside periphery of the workpiece against the sealing bead and the inner ends of the elastomer-covered finger assembly, with said inner ends flexibly deflecting downward and resiliently creating a fluid seal around the workpiece-underside periphery at the sealing bead;
- providing a ring of peripheral openings in the elastomeric covering of the fingers inward of the sealing bead and exposing the electrical contact tips of the fingers therethrough such that, during the downward deflecting of the fingers, there contact tips make resilient electrical contact with the underside periphery of the workpiece inward of the sealing bead, and wherein during said downward deflecting, the contact tips resiliently wipe clean the underside periphery of the workpiece as electrical contact is established.
Apparatus for fluid sealing while electrically contacting the underside perimeter of wet-processed workpieces, having in combination an elastomer-covered ring inwardly terminating in an upwardly projecting peripheral elastomeric sealing bead and covering an assembly of inwardly extending flexible fingers each having an upwardly projecting terminal electrical contact tip and upon the elastomer-covered inner ends of which fingers the perimeter of the underside of a workpiece adapted to be engaged along the sealing bead during the wet processing of the workpiece;
- with the underside of the workpiece placed within the ring means for forcing the underside periphery of the workpiece against the sealing bead and the inner ends of the elastomer-covered assembly of fingers, with said inner ends flexibly deflecting downward and resiliently creating a fluid seal around the workpiece-underside periphery at the sealing bead;
- a ring of peripheral openings formed in the elastomeric covering of the fingers inward of the sealing bead and exposing the electrical contact chips of the fingers their through such that, during said downward deflecting of the fingers, there contact tips make recently and electrical contact with the underside periphery of the workpiece inward of the sealing bead.
A method of fluid sealing while electrically contacting at or near the perimeter of wet-processed workpieces, that comprises, providing an elastomer-covered ring inwardly terminating in a upwardly projecting peripheral elastomeric sealing bead, and covering an assembly of inwardly extending flexible fingers each having a projecting terminal electrical contact and upon the elastomer-covered inner ends of which fingers the perimeter of the workpiece is to engage along the sealing bead during the wet processing of the workpiece;
- resting the workpiece within the ring and forcing the periphery of the workpiece against the sealing bead and the inner ends of the elastomer-covered finger assembly, with said inner ends flexibly deflecting and resiliently creating a fluid seal around the workpiece periphery at the sealing bead;
- providing a ring of peripheral openings in the elastomeric covering of the fingers inward of the sealing bead and exposing the electrical contact tips of the fingers therethrough such that, during the deflecting of the fingers, the contact tips make resilient electrical contact with the periphery of the workpiece inward of the sealing bead.
A method of fluid sealing while electrically contacting the underside perimeter of a wet processed workpiece in which an elastomer-covered ring is provided, inwardly terminating in an upwardly projecting peripheral elastomeric sealing bead covering an assembly of inwardly extending flexible fingers, each having an upwardly projecting terminal electrical contact;
- creating a resiliently fluid seal around the workpiece underside perimeter;
- and providing a ring of peripheral openings formed in the elastomer covering inward of the sealing bead.
Dependencies are inferred from the claim text.