Method and system for manufacture of field emission display
AssigneeMicron Technology, Inc.
InventorRobert T. Rasmussen
Life of this patent
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Abstract
High resolution color displays for field emission displays are formed by applying a grille to a screen layer, the grille having a set of holes formed therein exposing areas of the screen layer. A layer of photoresist is applied to the grille and the exposed areas of the screen layer, whereby a plurality of photoresist-covered screen layer areas are defined. One set of the plurality of photoresist-covered screen layer areas is fixed, whereby a fixed set and an unfixed set are defined. The photoresist is removed from the unfixed set and a light emitting substance is deposited on the exposed screen layer area. The fixed set of photoresist is plasma etched.
Claims8
A method for producing a high resolution display having a screen surface, comprising:
- depositing an electrically conductive coating over the screen surface;
- shielding the electrically conductive coating by disposing a grille on the electrically conductive coating, the grille having a plurality of holes that expose predetermined areas of the conductive coating;
- disposing a layer of photo-resist to the grille and the exposed areas of the conductive coating;
- fixing the photo-resist covered exposed areas to define a plurality of fixed areas and unfixed areas;
- stripping the photoresist from the unfixed areas to define a plurality of patterned areas;
- applying a light emitting substance onto the patterned areas;
- and
- plasma etching the plurality of fixed areas to remove the photo-resist.
Dependencies are inferred from the claim text.