Gas cabinet assembly comprising sorbent-based gas storage and delivery system
AssigneeAdvanced Technology Materials, Inc.
InventorsGlenn M. Tom, James V. McManus
Life of this patent
Estimating the term…
Abstract
A gas supply system including a gas cabinet defining an enclosure including therein a gas dispensing manifold and one or more adsorbent-based gas storage and dispensing vessels mounted in the enclosure and joined in gas flow communication with the gas dispensing manifold. The enclosure may be maintained under low or negative pressure conditions for enhanced safety in the event of leakage of gas from the gas storage and dispensing vessel(s) in the enclosure. The gas supply system may be coupled to a gas-consuming unit in a semiconductor manufacturing facility, e.g., an ion implanter, an etch chamber, or a chemical vapor deposition reactor.
Claims20
A gas supply system comprising a gas cabinet defining an enclosure including therein a gas dispensing manifold and one or more physical adsorbent-based gas storage and dispensing vessels mounted in the enclosure and joined in gas flow communication with the gas dispensing manifold, wherein each of said one or more physical adsorbent-based gas storage and dispensing vessels has disposed therein a physical adsorbent having sorptive affinity for a sorbate gas to be supplied by the gas supply system, and said physical adsorbent has said sorbate gas physically adsorbed thereon, with the gas dispensing manifold and said one or more physical adsorbent-based gas storage and dispensing vessels being constructed and arranged to effect desorption of the sorbate gas from the physical adsorbent, and flow of desorbed gas through the gas dispensing manifold for dispensing thereof exteriorly of the cabinet, without flow of carrier or other gas into said one or more physical adsorbent-based gas storage and dispensing vessels during said dispensing.
A gas supply system comprising a gas cabinet defining an enclosure including therein a gas dispensing manifold and one or more physical adsorbent-based gas storage and dispensing vessels mounted in the enclosure and joined in gas flow communication with the gas dispensing manifold, wherein said physical adsorbent contains less than 350 parts-per-million by weight of water, based on the weight of the physical adsorbent, a sorbate gas is adsorbed on said physical adsorbent, and each of said one or more physical adsorbent-based gas storage and dispensing vessels is closed to flow of gas other than discharge of said sorbate gas therefrom to said gas dispensing manifold.
A gas supply system comprising a gas cabinet defining an enclosure including therein a gas dispensing manifold and one or more physical adsorbent-based gas storage and dispensing vessels mounted in the enclosure and joined in gas flow communication with the gas dispensing manifold, and wherein a single component gas is supplied by said gas supply system in neat condition and each of said one or more physical adsorbent-based gas storage and dispensing vessels is constructed and arranged for supplying said single component gas without any flow of any other gas into said one or more physical adsorbent-based gas storage and dispensing vessels when said single component gas is supplied by said gas supply system.
A semiconductor manufacturing system comprising a gas supply system and a semiconductor manufacturing process unit coupled to the gas supply system for use in the semiconductor manufacturing process unit of gas supplied by the gas supply system, wherein:
- the gas supply system comprises a gas cabinet defining an enclosure including therein a gas dispensing manifold and one or more physical adsorbent-based gas storage and dispensing vessels mounted in the enclosure and joined in gas flow communication with the gas dispensing manifold,
- each of said one or more physical adsorbent-based gas storage and dispensing vessels has disposed therein a physical adsorbent medium having sorptive affinity for a sorbate gas to be supplied by the gas supply system, and said physical adsorbent medium has said sorbate gas physically adsorbed thereon, and
- the gas dispensing manifold and said one or more physical adsorbent-based gas storage and dispensing vessels are constructed and arranged to effect desorption of the sorbate gas from the physical adsorbent medium, and flow of desorbed gas through the gas dispensing manifold for dispensing thereof exteriorly of the cabinet to the semiconductor manufacturing process unit, without flow of carrier gas or other gas into said one or more physical adsorbent-based gas storage and dispensing vessels during said dispensing.
Dependencies are inferred from the claim text.