Optical reticle substrate inspection apparatus and beam scanning method of the same
AssigneeNEC Corporation
InventorMotonari Tateno
Life of this patent
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Abstract
An optical reticle substrate inspection apparatus is provided with a laser, a first acoustooptical element which scans a laser beam output from the laser, and a second acoustooptical element which generates a virtual image with a concave lens effect to the laser beam output from the first acoustooptical element. The optical reticle substrate inspection apparatus is further provided with a concave lens arranged on the output side of the laser beam of the second acoustooptical element and an optical system which images the virtual image on a reticle substrate being an object to be inspected. The concave lens magnifies the laser beam in a perpendicular direction to the scanning direction by the first acoustooptical element.
Claims8
An optical reticle substrate inspection apparatus, comprising:
- a laser;
- a first acoustooptical element which scans a laser beam output from said laser;
- a second acoustooptical element which generates a virtual image with a concave lens effect to said laser beam output from said first acoustooptical element;
- a concave lens arranged on the output side of said laser beam of said second acoustooptical element, said concave lens magnifying said laser beam in a perpendicular direction to the scanning direction by said first acoustooptical element;
- and
- an optical system which images said virtual image on a reticle substrate being an object to be inspected.
Dependencies are inferred from the claim text.